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 NameTool IdCategoryTool rateManufacturerModel
View 4-point probe - CMT SR2000N103MetrologyBAITCMT-SR2000N
View ALD - Oxford FlexAl445Thin film depositionCOxford InstrumentsFlexAl
View Aligner & Assembler - Ciposa - LCD line509Other processesBCiposa SASwitzerland
View Buffing tool - LCtec - LCD line507Other processesCLC-tec AB?
View CMP Polishing & Lapping tool - Logitech PM5 #11006Other processesCLogitechPM5
View CMP Polishing & Lapping tool - Logitech PM5 #21007Other processesCLogitechPM5
View Critical Point Dryer - Bal-Tec1170Other processesB??
View CVD - Aixtron - CNT440Thin film depositionCAixtronBlack Magic 2-inch
View CVD - Aixtron - Graphene1443Thin film depositionCAixtronBM HT Pro 2-inch
View CVD - MgB2 - PVD hybrid1165Thin film depositionCChalmers-
View CVD - MTI - CNT1451Thin film depositionBMTI-
View CVD - MTI - Graphene1446Thin film depositionBMTI CorporationOTF-1200X-4-II-C4OV-SL
View CVD - Parylene1180Thin film depositionASCSPDS 2010 Labcoter
View Dicing saw - Disco DAD33501011DicingCDiscoDAD3350
View Dicing saw - Loadpoint Microace 3+1008DicingCLoadpointMicroace 3+
View Diffractometer Xray - Panalytical X'Pert121MetrologyCPanalyticalX'Pert PRO MRD
View Dry etch IBE - Oxford Ionfab 300417Dry etchingCOxford Plasma TechnologyIonfab 300
View Dry etch IBE - Oxford Ionfab 300 Plus416Dry etchingDOxfordIonfab 300 Plus
View Dry etch ICP - Oxford Plasmalab 100 - Two chambers404Dry etchingDOxford Plasma TechnologyPlasmalab 100 ICP180
View Dry etch ICP - Oxford PlasmaPro 100405Dry etchingCOxford InstrumentsPlasmaPro 100 Cobra ICP 180
View Dry etch ICP - STS305Dry etchingDSTSICP MPX
View Dry etch ICP - STS - Deep Silicon etch307Dry etchingDSTSSTS ICP
View Dry etch RIBE - Oxford Ionfab 300412Dry etchingCOxford Plasma TechnologyIonfab 300
View Dry etch RIE - Advanced Vacuum418Dry etchingCPlasmaTherm/Advanced VacuumBatchtop m/91
View Dry etch RIE - Plasma-Therm419Dry etchingCPlasmathermBatchTop m/95
View Dry etch RIE - Plasma-Therm - Oxygen422Dry etchingCPlasma ThermBatchTop RIE
View Dry etch Stripper - TePla228Dry etchingCTePla AG300PC
View EBL - JEOL JBX 9300FS217LithographyEJEOL Ltd.JBX9300FS
View EBL - Raith EBPG 5200215LithographyERaithEBPG 5200
View EBL Sample pre-aligner242LithographyAChalmers MC2PAMS 0401
View Ellipsometer - J.A. Woollam M2000112MetrologyCJ.A. WoollamM2000
View Ellipsometer - Sagax Isoscope104MetrologyBSagaxIsoscope
View Evaporator - AVAC420Thin film depositionCAVACHVC600
View Evaporator - Bell jar408Thin film depositionCChalmersEva
View Evaporator - Edwards425Thin film depositionCEdwardsAuto 306
View Evaporator - Lesker Nano Cr455Thin film depositionBLeskerNano36
View Evaporator - Lesker PVD 225 #1451Thin film depositionDLeskerPVD 225
View Evaporator - Lesker PVD 225 #2452Thin film depositionDLeskerPVD 225
View Evaporator - Lesker Spectros434Thin film depositionDLeskerSpectros
View Evaporator - Plassys521Thin film depositionDPlassysMEB 550 S
View Evaporator - Varian406Thin film depositionCVarianVT 118 UHV
View Flood exposure - Bachur & Associates - DUV261LithographyBBachur & AssociatesLS 150X-5C2 500W
View Fume Hood - Acid & Base - HF & BOE Work656Wet processingAStangl656
View Fume Hood - Acid & Base - Hot Acid Work236Wet processingAStangl236
View Fume Hood - Acid & Base - PLD target polishing659Wet processingAStangl659
View Fume Hood - Acid & Base - Wash-up660Wet processingAStangl660
View Fume Hood - Solvent234Wet processingAStangleWetbench
View Fume hood - Solvent - Dicing preparation1002Wet processingAStanglWetbench/Fumehood
View Fume Hood - Solvent - Polishing preparation1001Wet processingAStangl1001
View Furnace - Centrotherm #1.1 Oxidation (restricted)7071Thermal processingBCentrothermDry oxidation
View Furnace - Centrotherm #1.2 Wet & dry oxidation (public)7072Thermal processingBCentrothermWet oxidation
View Furnace - Centrotherm #1.3 Wet & dry oxidation7073Thermal processingBCentrothermWet oxidation
View Furnace - Centrotherm #3.1 Al anneal7051Thermal processingBCentrothermAl anneal
View Furnace - Centrotherm #3.2 Au anneal7052Thermal processingBCentrothermAu anneal
View Furnace - Centrotherm #3.3 Hi temp anneal7053Thermal processingBCentrothermHi temp anneal
View Furnace - Centrotherm #4.3 LPCVD - SiN7083Thermal processingCCentrothermLPCVD Furnace
View Furnace - Centrotherm #4-2 LP-TEOS7082Thermal processingCCentrothermLP-TEOS
View Furnace - Centrotherm #4-4 LP-Polysilicon7084Thermal processingCCentrothermLP-Polysilicon
View Furnace - Graphene SiC1449Thermal processingBGraphensic-
View Furnace - Lenton1012Thermal processingALentonAWF 12/65
View Furnace - Thermolyne - BCB cure436Thermal processingABarnstead Thermolyne47900
View Furnace - Thermolyne - Open Tube/1600°C713Thermal processingBBarnstead/ThermolyneThermolyne- M. 59340
View Furnace - Wet oxidation411Thermal processingCChalmersFurnace for III/V materials
View Glue Dispensing System - LCD line515Other processesBAsymptek402
View Hotplate - Solar-semi629LithographyASolar-semi gmbHQS-H-200BM
View Hotplate - Solar-semi & BLE - Microwave line535LithographyAPM-plastWet bench
View Hotplate - Wenesco - SU8/BCB247LithographyAWenescoCustom
View Laser writer - Heidelberg Instruments DWL 2000262LithographyDHeidelberg InstrumentsDWL 2000
View Mask aligner - Canon PPC-2101117LithographyCCanonPPC-210
View Mask aligner - Suss MA 6 #2213LithographyCSuss MicroTecMA6
View Mask aligner - Suss MA/BA 6 #1205LithographyCSuss MicroTecMA/BA 6
View Mask aligner - Suss MJB2222LithographyCKarl SussMJB2
View Mask aligner - Suss MJB3 DUV224LithographyCKarl SussMJB3 DUV
View Mask aligner - Suss MJB3 UV 400 #1210LithographyCKarl SussMJB3
View Mask aligner - Suss MJB3 UV 400 #2268LithographyCKarl SussMJB3
View MBE - EPI 930806EpitaxyEMBEEPI 930
View MBE - Riber C21808EpitaxyERiberCompact 21 T-E Cluster
View Microscope - Olympus BX521113MetrologyAOlympusBX51
View Microscope - Olympus MX40 - III/V area630MetrologyAOlympusMX40
View Microscope - Olympus MX40 - Silicon area102MetrologyAOlympusMX40
View Microscope - Olympus MX41635MetrologyAOlympusMX40
View Microscope - Olympus MX50 - III/V area106MetrologyAOlympusMX50
View Microscope - Olympus MX50 - Metrology area125MetrologyAOlympusMX50
View Microscope - Olympus MX50 - Nano area266MetrologyAOlympusMX50
View Microscope - Olympus MX50 - Nano area243MetrologyAOlympusMX50
View Microscope stereo - Olympus SZH-11126MetrologyAOlympusSZH-10
View Microscope stereo - Olympus SZX-12638MetrologyAOlympusSZX-12
View Microscope stereo - Olympus SZX-9 - PL1244MetrologyAOlympusSZX-9
View Microscope stereo - Olympus SZX-9 - PL21010MetrologyAOlympusSZX-9
View Nanoimprint - CNI265LithographyBNilTCNI
View Oven - Solid Dopant Storage1114Other processesC--
View Ozone Cleaning - FHR229Other processesBFHR Anlagenbau GmbHUVOH 150
View Ozone Cleaning - Novascan130Sample prepBNovascanPSD-UVT
View Parameter Analyzer - Keithley 4200SCS123MetrologyBKeithley4200-SCS
View PECVD - Smoltek - Remote plasma1127Thin film depositionCDCA?
View PECVD - STS303Thin film depositionCSTSPECVD
View PLD - Calas System11411Thin film depositionCChalmers/Staffan PehrsonGeneration III
View PLD - Carbon System11413Thin film depositionCChalmers-
View PLD - Compex 205 Laser1141Thin film depositionCLambda-PhysikCompex 205
View PLD - Compex Pro 110 Laser1140Thin film depositionCLambda-PhysikCompex 110
View PLD - DCA Cluster1142Thin film depositionCDCA InstrumentsUHV PLD
View PLD - RHEED System11412Thin film depositionCChalmers/TSSTHigh pressure RHEED
View PLD - Small System11401Thin film depositionCChalmers/Staffan PehrsonGeneration I
View PLD - Twin System11402Thin film depositionCChalmers/Staffan PehrsonGeneration II
View PPMS - Quantum Design122MetrologyCQuantum DesignPPMS 14T
View Quartz tube cleaner601Wet processingA--
View Quartz tube stocker661Other processesBStanglQuartz tube stocker
View Raman microscope - Horiba128MetrologyBHoribaXploRA
View RTP - AccuThermo AW610 - InP431Thermal processingCAllwin21AccuThermo AW610
View RTP - AccuThermo AW610 - Wide bandgap433Thermal processingCAllwin21AccuThermo AW610
View RTP - Forming gas410Thermal processingCChalmersOpto
View RTP - JIPELEC JetFirst 100435Thermal processingCJIPELECJetFirst 100
View RTP - JIPELEC JetFirst 200437Thermal processingCJIPELECJetFirst 200
View RTP - STEAG402Thermal processingCSteagSHS 100M
View Scriber - Suss - Hard wafers1009DicingA--
View Scriber - Suss - Soft wafers413DicingA--
View Scriber breaker - Loomis1013DicingBLoomisLSD-100
View SEM - JEOL JSM 6301F110MetrologyCJEOL Ltd.JSM6301F
View SEM - Zeiss Supra 55 - EDX115MetrologyCZeissSupra 55 VP
View SEM - Zeiss Supra 60 VP - EDX116MetrologyCZeissSupra 60 VP
View Software - GenISys BEAMER1410LithographyAGenISys GmbHProximity Correction
View Software - GenISys LAB1411LithographyAGenIsysLAB simulation package
View Software - Proxecco proximity correction1400LithographyBPDF Solutions GmBHProxecco-7.0
View Software - SPM/AutoCAD140MetrologyBHP140
View Spectrometer EDX - IXRF117MetrologyBIXRF-
View Spinner - BLE218LithographyABLEBLE
View Spinner - BLE & HMDS hotplate - Microwave line534LithographyAPM-plastWet bench
View Spinner - BLE & Oven501LithographyAStangl#501
View Spinner - Headway1116LithographyAHeadway1116
View Spinner - Laurell & hotplates - Unconventional resists251LithographyALaurell + BLEWS-400B-6NPP-LITE-IND + Delta200_Hotplates
View Spinner - Suss LabSpin6220LithographyASuss Microtech-
View Spinner - Suss LabSpin6214LithographyASussLabSpin
View Spinner - Suss LabSpin6 & High temp hotplates255LithographyASuss Microtech-
View Spinner - Suss LabSpin6 & Low temp hotplates219LithographyASuss Microtech-
View Spinner - Suss RCD8209LithographyCSussRCD8
View SPM - Bruker Dimension 3100132MetrologyCBrukerDimension 3100 SPM
View SPM - Bruker Dimension ICON134MetrologyCBrukerDimension ICON
View Sputter - AJA427Thin film depositionDAJA InternationalAJA Orion 6-UD
View Sputter - Balzers407Thin film depositionCBalzers/PfeifferPLS 550
View Sputter - DCA - Ferroelectrics428Thin film depositionDDCAMTD 620
View Sputter - DCA Cluster - Metals1144Thin film depositionDDCAMTD 450
View Sputter - DCA Cluster - Oxides1143Thin film depositionDDCAMTD 450
View Sputter - FHR400Thin film depositionDFHRMS150
View Sputter - NORDIKO401Thin film depositionBNordiko2000
View Sputter - Pfeiffer426Thin film depositionCPfeiffer VacuumSLS-630G "Spider"
View Stepper - Canon i4202LithographyDCanonFPA 3000-i4
View Substrate bonder - Suss SB6269Other processesC--
View Surface Profiler - Dektak240MetrologyBVeecoVeeco Dektak D150
View Surface profiler - Tencor AS500 #1230MetrologyBTencorAS500
View Surface profiler - Tencor AS500 #2232MetrologyBKLA TencorAS500
View Surface profiler - Tencor P15108MetrologyBKLA TencorP-15
View Surface profiler - Wyko NT 1100 - Optical114MetrologyCVeecoNT 1100
View UV illumination box511Other processesASolectro AB??
View Vacuum oven - Fischer Scientific -Block Copolymer processing1175Thermal processingAFischer Scientific282A
View Vacuum oven - Hereaus500Thermal processingAHereaus#500
View Vacuum packer - LCD line510Other processesAMultivac509.5
View Vacuum sealer540Other processesAAirZeroAZ-450
View Wafer Expander - Dynatex1017DicingADynatexDXE Wafer Expander
View Wafer Inspection System - IR127MetrologyA--
View Wet Bench - Acid & Base623Wet processingAStanglStangl
View Wet Bench - Acid & Base653Wet processingAStangl1940-40
View Wet Bench - Acid & Base654Wet processingAStangl654
View Wet Bench - Acid & Base1109Wet processingAStangl1109
View Wet Bench - Acid & Base1110Wet processingAStangl1110
View Wet Bench - Acid & Base - Al-etch bath652Wet processingAStangl652
View Wet Bench - Acid & Base - BOE bath657Wet processingAStangl657
View Wet Bench - Acid & Base - Chemical preparation1309Wet processingA00
View Wet Bench - Acid & Base - Developer Bath - Microwave line532Wet processingAPM-plastWet bench
View Wet Bench - Acid & Base - Developer Spinner204Wet processingABLE-
View Wet Bench - Acid & Base - Developer Work1118Wet processingAStanglWetbench
View Wet Bench - Acid & Base - Developer Work - Microwave line533Wet processingAPM-plastWet bench
View Wet Bench - Acid & Base - Developer Work & Stereo Microscope627Wet processingAStangl627
View Wet Bench - Acid & Base - Electroplating621Wet processingBStangl621
View Wet Bench - Acid & Base - KOH bath & NaOH work609Wet processingAStanglStangl
View Wet Bench - Acid & Base - Piranha Cleaning Bath238Wet processingAPM-plastWet bench
View Wet Bench - Acid & Base - Standard Clean baths (SC1/SC2)651Wet processingBStangl651
View Wet Bench - Hotplate & HMDS & Oven260LithographyAStanglStangl
View Wet Bench - Solvent608Wet processingAStanglStangl
View Wet Bench - Solvent1112Wet processingAStanglM
View Wet Bench - Solvent - Chemical preparation 1302Wet processingAStangl-
View Wet Bench - Solvent - Developer Work208Wet processingAStanglStangl
View Wet Bench - Solvent - Developer Work 256Wet processingAStanglWetbench
View Wet Bench - Solvent - Development work & Hot Plate253Wet processingAStangl + BLEWetbench
View Wet Bench - Solvent - Liftoff Bath624Wet processingAStanglWetbench
View Wet Bench - Solvent - Mask cleaning505Wet processingAStangl505
View Wet Bench - Solvent - Megasonic bath628Wet processingAStangl628
View Wet Bench - Solvent - Remover Bath655Wet processingAStangl655
View Wet Bench - Solvent - Ultrasonic bath625Wet processingAStangl625
View Wet Bench - Solvent - Ultrasonic bath620Wet processingAStanglStangl
View Wet Bench - Solvent - Ultrasonic bath622Wet processingAStangl622
View Wet Bench - Solvent - Ultrasonic bath - Microwave line531Wet processingAPM-plastWet bench
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