Picture of Spinner - Suss RCD8
Current status:
AVAILABLE
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Spinner for SU-8 and BCB only.

Chucks available for small pieces up to 4".

Gyrset cover available for 4" wafers.

 

 


 

Tool name:
Spinner - Suss RCD8
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Suss
Model:
RCD8
Max booking time, day:
3 hours
Max booking time, night:
3 hours
No. of future bookings:
5

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