Picture of Software - Proxecco proximity correction
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Tool #1400 Proxecco proximity correction software for e-beam lithography. Electron scattering effects makes it difficult to combine small and large features in the same region. This software analyzes the pattern dependent "background radiation" and compensates for this by fracturing the pattern into smaller regions and assigning different exposure dose levels to different parts.

Tool name:
Software - Proxecco proximity correction
Area/room:
[Not defined]
Category:
Lithography
Manufacturer:
PDF Solutions GmBH
Model:
Proxecco-7.0
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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