Picture of Evaporator - AVAC
Current status:
WARNING
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Tool #420 - AVAC HVC600 - is a general purpose, multi-material evaporator. It has a 4-pocket 4 kW e-gun and two resistive evaporation sources. The pumping system is fully automatic, the high vacuum pump is a CTI 8” cryo which gives a base pressure of 3*10E-7 mbar. Because of the variety of materials used, cross-contamination should be expected, and it should only be used for contacts and applications where purity of materials is a not big issue. Substrate holder size is 93 mm. Available materials include Ag, Al, Al2O3, Au, C, Cr, Cu, Nb, Ni, NiCr, Pt, Si, SiO2, Ti.

Tool name:
Evaporator - AVAC
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
AVAC
Model:
HVC600
Max booking time, day:
4 hours
Max booking time, night:
12 hours
No. of future bookings:
4

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