Picture of Evaporator - Plassys
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

Computer controlled evaporation tool dedicated for fabrication of quantum devices. It has a high precision tilting/rotating sample holder for shadow evaporation, and oxygen gas inlet for oxidation of tunnel barriers. The source chamber is cryo pumped and separated from the sample chamber by a gate valve. The sample chamber is turbo pumped, and is equipped with an ion gun for sample pre-cleaning and etching. Materials allowed: Al

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
Evaporator - Plassys
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Plassys
Model:
MEB 550 S
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
10

Instructors

Licensed Users

You must be logged in to view tool modes.