Picture of Dry Etch ICP - Oxford - Deep Silicon etch
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Tool name:
Dry Etch ICP - Oxford - Deep Silicon etch
Area/room:
Processlab 1
Category:
Dry etching
Manufacturer:
Oxford Instruments
Model:
??
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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