CVD/PECVD system for growth of carbon nanotubes and nanofibers, and graphene.
PC controlled process and data logging.
C2H2, NH3, H2, N2, Ar, CH4 (diluted, 5% CH4 in Ar)
Electrical substrate heater:
RT – 850°C
Pulsed DC 1-100kHz, max 800V, 2.5A, 1kW
small pieces up to 2 inch