Picture of PLD - Calas System
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1141.1 (CALAS): A computer controlled PLD (Pulsed Laser Deposition) equipment designed and built at Chalmers. The system is equipped with an advanced target revolver for up to six targets, and is mainly used for deposition of high Tc superconductors and related materials. The base pressure of the turbo pumped system is <5*10E-7 mbar, and the sample size is normally 5*5 mm.

Tool name:
PLD - Calas System
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Chalmers/Staffan Pehrson
Model:
Generation III
Max booking time, day:
10 hours
Max booking time, night:
10 hours
No. of future bookings:
5

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