Picture of Spinner - Polos & hotplates - Unconventional resists
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Placement: Process lab 1, nanolithography. This station is equipped with a Polos spinner and two BLE hotplates. It is intended for unconventional resists such as HSQ, BCB, SU-8 etc.

Tool name:
Spinner - Polos & hotplates - Unconventional resists
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Polos + BLE
Model:
Polos + Delta200_Hotplates
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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