Picture of Spinner - Laurell & hotplates - Unconventional resists
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AVAILABLE
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Placement: Process lab 1, nanolithography. This station is equipped with a Laurell WS-400-6NPP-LITE/IND spinner and two BLE hotplates. It is intended for unconventional resists such as HSQ, etc. Note: BCB and SU-8 should be applied in tool #209.

Tool name:
Spinner - Laurell & hotplates - Unconventional resists
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Laurell + BLE
Model:
WS-400B-6NPP-LITE-IND + Delta200_Hotplates
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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