Picture of Sputter - DCA - Ferroelectrics
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A magnetron sputter tool dedicated to ferroelectric materials used for fabricating varactors, designed for substrate sizes up to 100 mm (150 mm wafers can be fitted). Equipped with a rotatable substrate heater, three sputter guns, mass flow controllers for Ar, O2 and N2, and turbo pumping system

Tool name:
Sputter - DCA - Ferroelectrics
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
DCA
Model:
MTD 620
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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