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A load-lock magnetron sputter tool dedicated to high quality Al deposition for quantum technology. Designed for substrate sizes up to 100 mm.  Equipped with a rotatable substrate heater, up to four 4" magnetron cathodes, mass flow controllers for Ar, O2 and N2, and turbo pumping system.

Tool name:
Sputter - DCA - Ferroelectrics
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
DCA
Model:
MTD 620
Tool rate:
D
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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