Picture of CVD - Parylene
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The Parylene deposition system consists of a series of connected vacuum chambers that sequentially produce parylene vapor, pyrolize it, deposit it as a polymer, and then capture its effluent.

Tool name:
CVD - Parylene
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
SCS
Model:
PDS 2010 Labcoter
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hours
Max booking time, night:
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