Picture of Spinner - Suss LabSpin6 & High temp hotplates
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Workspace with a resist spinner, two hotplates, and one oven with fan air circulation. The hotplates here are used for high temperature polymers, such as PMMA, Copolymer, ZEP, and LOR.

*SU8 and BCB are not allowed to be used on this spinner, please use tool #251 instead.

Tool name:
Spinner - Suss LabSpin6 & High temp hotplates
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Suss Microtech
Model:
-
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
15

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