Picture of Hotplate - Solar-semi & BLE - Microwave line
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Wet bench with two hot plate modules for baking of photo resist and ebeam resist. Usage is reserved for the microwave and photonic processing line.

Tool name:
Hotplate - Solar-semi & BLE - Microwave line
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
PM-plast
Model:
Wet bench
Max booking time, day:
8 hours
Max booking time, night:
16 hours
No. of future bookings:
5

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Licensed Users

Microwave and Photonics process line
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