Picture of Ozone Cleaning - Novascan
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AVAILABLE
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Removes organic surface contamination.

 

Workpiece size: Up to 4-inch wafers
Heater temperature: RT and up to 100C
Allowed materials: Any

 

Tool name:
Ozone Cleaning - Novascan
Area/room:
Processlab 1
Category:
Sample prep
Manufacturer:
Novascan
Model:
PSD-UVT
Max booking time, day:
8 hours
Max booking time, night:
8 hours
No. of future bookings:
8

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