Tool #431 Rapid Thermal Processor (RTP) AccuThermo AW610
The RTP AccuThermo AW610 is a PC controlled halogen lamp furnace. It accommodates 100mm wafers, or smaller wafers and pieces placed on a 100mm carrier wafer. This RTP is typically used for alloying of ohmic contacts on InP, GaN, and SiC. Not allowed for GaAs.
Ar or N2
Up to 100mm
Max practical heating rate:
InP, Sapphire, SiC, Quatrz, Si