BEAMER is a powerful pattern pre-processing toolbox to prepare a CAD design for electron beam lithography exposure. It includes proximity correction, boolean functions, size bias, etc. and a large number of other functions. It will directly export your design to e-beam compatible format, ready to expose. 

It runs on Linux and Windows 64-bit. You may try it out from your mc2-p005 account as a start, but we recommend that you install it on a local powerful desktop Windows or Linux computer, to distribute the processing load. We have a licenses server that allows up to 8 simultanous user sessions, independent of hardware platform, so BEAMER can be installed on an unlimited amount of computers in our building.