Picture of Wet Bench - Solvent - Liftoff Bath
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

Workplace for liftoff processes. Plain resist stripping is possible but not recommended due to particle contamination. Automatic fire protection is installed for our safety.

Equipment: Remover ultrasonic bath (10L), filtered IPA bath, QDR, water spraygun, N2 blowgun
Remover workpiece size: Up to 4-inch wafers
IPA workpiece size: Up to 4-inch wafers
QDR workpiece size: Up to 4-inch wafers
   
Materials allowed: Any

 

Tool name:
Wet Bench - Solvent - Liftoff Bath
Area/room:
Processlab 1
Category:
Wet processing
Manufacturer:
Stangl
Model:
Wetbench
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
15

Instructors

Licensed Users

You must be logged in to view tool modes.