Picture of CMP Polishing & Lapping tool - Logitech PM5 #2
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

Tool #1007 Logitech PM5. Equipment, purchased March 2011.

The machine uses abrasive slurry and chemical solution to lap and polish silicon, GaAs, InP and other substrates. The logbook document is now included in the green binder, please use that when using the PM5.

Please use the simpler/"cheap" paper for cleaning up, not the expensive cleanroom wipers. 

There is a weight set-up available for measuring the load in the PP6 jig.

NEVER DUMP SLURRY DOWN THE SINK! There is a waste container beneath the PM5, which should go to destruction when full. An empty container (blue, 25 litre) is usually available in the room for easy exchange. Check the level before using the equipment!

Tool name:
CMP Polishing & Lapping tool - Logitech PM5 #2
Area/room:
Saw room
Category:
Other processes
Manufacturer:
Logitech
Model:
PM5
Max booking time, day:
12 hours
Max booking time, night:
12 hours
No. of future bookings:
2

Instructors

Licensed Users

You must be logged in to view tool modes.