Picture of CMP Polishing & Lapping tool - Logitech PM5 #1
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Tool #1006 Logitech PM5. Old Equipment, 1997.
The machine uses abrasive slurry and chemical solution to lap and polish silicon, GaAs, InP and other substrates. The logbook document is now included in the green binder, please use that when using the PM5.
There is a weight set-up available for measuring the load in the PP6 jig.

The LAPPING/POLISHING PLATES
The stainless steel plate labeled A with a Chemcloth pad, is now dedicated only for SF1 polishing! Please rinse carefully after usage. It is in the drawer on the left side in lab.
The Chemcloth pad on plate C is only to be used with Chemlox polishing liquid for III-V compounds.It is in the drawer on the left side in lab.
 The Aluminium plate B is dedicated to be used with lapping films. Please dont attach any chemcloth on that plate anymore! It is in the drawer on the right side in lab

AFTER WORK!
DONT forget to shut off the Digital gauge on the PP6 jig!

 NEVER DUMP SLURRY DOWN THE SINK! There is a waste container beneath the PM5, which should go to destruction when full. An empty container (blue, 25 litre) is usually available in the room for easy exchange. Check the level before using the equipment!
Please use the simpler/"cheap" paper for cleaning up, not the expensive cleanroom wipers. 

 

Tool name:
CMP Polishing & Lapping tool - Logitech PM5 #1
Area/room:
Saw room
Category:
Other processes
Manufacturer:
Logitech
Model:
PM5
Max booking time, day:
24 hours
Max booking time, night:
8 hours
No. of future bookings:
5

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