Lambda-Physik excimer laser working with KrF chemistry and unbalanced resonator optics, which gives a low divergence beam. Wavelength 248 nm, maximum pulse energy 480 mJ, max repetition rate 50 Hz. Used for pulsed laser deposition (PLD) in tool #11411 (Calas system), 11412 (RHEED system) and 11413 (Carbon system).