Picture of PLD - Compex 205 Laser
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Lambda-Physik excimer laser working with KrF chemistry and unbalanced resonator optics, which gives a low divergence beam. Wavelength 248 nm, maximum pulse energy 480 mJ, max repetition rate 50 Hz. Used for pulsed laser deposition (PLD) in tool #11411 (Calas system), 11412 (RHEED system) and 11413 (Carbon system).

Tool name:
PLD - Compex 205 Laser
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Lambda-Physik
Model:
Compex 205
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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