Picture of Wet Bench - Solvent - Remover Bath
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Wet bench dedicated for resist stripping. Lift-off should NOT be performed here (use wet bench 624)!

The bench is equipped with a remover bath, acetone bath and QDR bath (DI water). The remover bath is filled with Remover mr-Rem 400. It has an ultrasonic function and can either be heated (fixed set point at 55 °C) or work can be done at RT. Acetone bath can only be used at RT, the heater is not connected.

The bench also has a Rinse and Dryer for 3" wafers.

An automatic fire extinguisher is installed above the chemical baths.

Tool name:
Wet Bench - Solvent - Remover Bath
Area/room:
Processlab 1
Category:
Wet processing
Manufacturer:
Stangl
Model:
655
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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