Picture of PLD - DCA Cluster
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UHV PLD system for High TC superconductor and related materials deposition. Max sample size 2". Connected to a cluster of 3 deposition modules with a common transfer and loading system. Both loading of substrates and exchange of targets is possible at UHV.

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
PLD - DCA Cluster
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
DCA Instruments
Model:
UHV PLD
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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