Picture of Sputter - DCA Cluster - Oxides
Current status:
WARNING
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Near-UHV sputter tool restricted to thin film deposition of High TC superconductors and related materials. Equipped with four 3" magnetron sources and heated sample stage for up to 2" sample size. Targets available are PBCO, SrTiO3, CeO2, Y2O3/ZrO2 and MgO. Connected to a cluster of 3 deposition modules with a common transfer and loading system.

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
Sputter - DCA Cluster - Oxides
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
DCA
Model:
MTD 450
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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