Near-UHV sputter tool restricted to thin film deposition of High TC superconductors and related materials. Equipped with four 3" magnetron sources and heated sample stage for up to 2" sample size. Targets available are PBCO, SrTiO3, CeO2, Y2O3/ZrO2 and MgO. Connected to a cluster of 3 deposition modules with a common transfer and loading system.
Funded by: Knut and Alice Wallenbergs foundation.