Picture of Sputter - DCA Cluster - Oxides
Current status:
WARNING
Book | Log
Show/Collapse all

You must be logged in to view files.

Near-UHV sputter tool for thin film deposition of High TC superconductors and related materials. Equipped with 2*3" magnetron sources and 2*2" Diode sources. Max sample size 2". Connected to a cluster of 3 deposition modules with a common transfer and loading system.

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
Sputter - DCA Cluster - Oxides
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
DCA
Model:
MTD 450
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

Instructors

Licensed Users

You must be logged in to view tool modes.