Picture of PLD - Small System
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1140.1 (Small): First generation PLD (Pulsed Laser Deposition) equipment designed and built at Chalmers. Equipped with a simple, threee position target rotor and simple manual control. Used mainly for Manganite depositions. The base pressure of the turbo pumped system is <5*10E-6 mbar, and the sample size is normally 5*5 mm.

Tool name:
PLD - Small System
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Chalmers/Staffan Pehrson
Model:
Generation I
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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