Picture of Surface profiler - Tencor AS500 #2
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AVAILABLE
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Surface profiler with a 2.5 micron wide stylus tip with fixed stylus force.

Max. allowed trench depth:  100 micron

Stylus cone angle: 60 deg.

Software leveling and two ranges available.

Tool name:
Surface profiler - Tencor AS500 #2
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
KLA Tencor
Model:
AS500
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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