Picture of Surface profiler - Tencor AS500 #2
Current status:
AVAILABLE
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This profiler is dedicated for the microwave- and opto-process lines.

Tool name:
Surface profiler - Tencor AS500 #2
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
KLA Tencor
Model:
AS500
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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