Picture of Mask aligner - Canon PPC-210
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Projection print aligner, i-line UV photolithography

Workpiece size: Up to 2-inch wafers
Materials allowed: Any
Reduction ratio: 1:1
mask size: 2 inch
intensity: 5mW/sqcm
Tool name:
Mask aligner - Canon PPC-210
Area/room:
Processlab 2
Category:
Lithography
Manufacturer:
Canon
Model:
PPC-210
Max booking time, day:
8 hours
Max booking time, night:
8 hours
No. of future bookings:
8

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