Picture of 4-point probe - CMT SR2000N
Current status:
AVAILABLE
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Tool 103 is an automated system for measuring resistivity and sheet resistance of wafers and thin metal films. Measurement is by a four point probe with thin metal needles that make contact to the surface.

Measuring range is 1 mohm/sq to 2 Mohm/sq.

Max wafer size is 200 mm diameter.

Operation is normally by computer control but manual measurements are also possible.

Single point measurement as well as full wafer mapping is possible.

Tool name:
4-point probe - CMT SR2000N
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
AIT
Model:
CMT-SR2000N
Max booking time, day:
10 hours
Max booking time, night:
10 hours
No. of future bookings:
5

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