Picture of RTP - AccuThermo AW610 - Wide bandgap
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Tool #433  Rapid Thermal Processor (RTP)  AccuThermo AW610

The RTP AccuThermo AW610 is a PC controlled halogen lamp furnace. It accommodates 100mm wafers, or smaller wafers and pieces placed on a 100mm carrier wafer. This RTP is typically used for alloying of ohmic contacts on InP, GaN, and SiC. Not allowed for GaAs.

Specifications:

Process gas:
Ar or N2

Wafer size:
Up to 100mm

Max temperature:
1000°C

Max practical heating rate:
20°C/sec

Temperature sensor:
Pyrometer

Alowed substrates:
InP, Sapphire, SiC, Quatrz, Si

Tool name:
RTP - AccuThermo AW610 - Wide bandgap
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
Allwin21
Model:
AccuThermo AW610
Max booking time, day:
6 hours
Max booking time, night:
6 hours
No. of future bookings:
5

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