Picture of Evaporator - Varian
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Tool #406: UHV evaporation system The 406 is a Varian VT 118 e-beam evaporation system, equipped with a 3-pocket source. It has been modified for angle evaporation of ITO on small samples (<2") with rotation. Heating and oxygen flow during evaporation is possible.

Tool name:
Evaporator - Varian
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Varian
Model:
VT 118 UHV
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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