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Tool #435  Rapid Thermal Processor (RTP) JIPELEC Jet First 100

The JIPELEC Jet First 100 is a PC controlled halogen lamp furnace. It accommodates 100mm wafers or smaller wafers placed on a 100mm graphite wafer. It is dedicated for thermal processing of GaAs.

Specifications:

Process gas:
Ar or N2

Wafer size:
up to 100mm

Max temperature:
1000°C

Temperature sensor:
Thermocouple or Pyrometer

Allowed substrates:
GaAs

Tool name:
RTP - JIPELEC JetFirst 100
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
JIPELEC
Model:
JetFirst 100
Max booking time, day:
6 hours
Max booking time, night:
8 hours
No. of future bookings:
5

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