Tool #435 Rapid Thermal Processor (RTP) JIPELEC Jet First 100
The JIPELEC Jet First 100 is a PC controlled halogen lamp furnace. It accommodates 100mm wafers or smaller wafers placed on a 100mm graphite wafer. It is dedicated for thermal processing of GaAs.
Ar or N2
up to 100mm
Thermocouple or Pyrometer