Picture of Spinner - Suss LabSpin6
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Wet bench with photoresist spinner. Accomodates chip size from 5x5mm up to 6 inches wafer.

Tool name:
Spinner - Suss LabSpin6
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Suss Microtech
Model:
-
Tool rate:
A
Price/hour:
Low: 125 SEK
Medium: 250 SEK
High: 370 SEK

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