Tool #434 Evaporator Lesker Spectros
The Lesker Spectros is an UHV e-beam evaporator dedicated for the microwave- and opto-process lines. The wafer holder can be tilted, rotated, and water cooled during the process.
Al, Au, Pd, Ge, Ni, Pt, Ti
Up to one 100mm wafer clamped to a 110mm x 110mm transfer plate
Funded by: Knut and Alice Wallenbergs foundation.