Picture of Evaporator - Lesker Spectros
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Tool #434  Evaporator Lesker Spectros

The Lesker Spectros is an UHV e-beam evaporator dedicated for the microwave- and opto-process lines. The wafer holder can be tilted, rotated, and water cooled during the process.

Specifications:

Base pressure:
1x10-7 mbar

Sources:
Al, Au, Pd, Ge, Ni, Pt, Ti

Wafer size:
Up to one 100mm wafer clamped to a 110mm x 110mm transfer plate

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
Evaporator - Lesker Spectros
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Lesker
Model:
Spectros
Max booking time, day:
6 hours
Max booking time, night:
6 hours
No. of future bookings:
5

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