Tool #434 Evaporator Lesker Spectros
The Lesker Spectros is a load-locked e-beam evaporator dedicated for the microwave- and opto-process lines. The wafer holder can be tilted, rotated, and water cooled during the process.
< 1x10-7 mbar
Al, Au, Pd, Ge, Ni, Pt, Ti, Ta
Up to one 100mm wafer clamped to a 110mm x 110mm transfer plate
Funded by: Knut and Alice Wallenbergs foundation.