Picture of Evaporator - Lesker Nano Cr
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The Lesker Nano 36 is a thermal evaporator mainly for deposition of Cr thin films. The main application is to provide reflective and conductive layers for wafers prior to electron beam and laser lithography.

Substrates from small pieces up to 150mm wafers can be accommodated. The minimum pumping time is approximately 15min.

Tool name:
Evaporator - Lesker Nano Cr
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Lesker
Model:
Nano36
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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