Picture of White Light Reflectance Spectroscopy (WLRS) - ThetaMetrisis
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AVAILABLE
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The FR-Pro-UV/VIS optical film thickness measurement system is based on Reflected White Light Spectroscopy over a wavelength range of 220 - 850m nm.

The reflected spectrum is complared to a baseline reference spectrum from bare Silicon, and fitted to a model spectrum of the film stack thicnesses and material composition. A library of models for thin films of dielectrics, polymers, resists, semiconductors, metals, etc. is installed.

Wafers and substrates can be mapped by automated measurements using a motorised stage convering a movement range of 100 x 100 mm.

It is also possible to do automated measurements of arbitrary points from a coordinate list with mapped registration, using 3 alignment marks on the wafer.

 

Tool name:
White Light Reflectance Spectroscopy (WLRS) - ThetaMetrisis
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
Theta Metrisis
Model:
FR-Pro-UV/VIS
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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