Picture of SPM - Bruker Dimension 3100
Current status:
AVAILABLE
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Scanning probe microscopy system.

Installed&accepted: 2010
Funded by: Local funds, second hand
Computer control: WIN XP
Control software: v6.41r30
Workpiece size: Chips >5-35mm, 2, 3, 4, 6 and 8 inch wafers, 3, 4 and 6 inch square
Materials allowed: Any cleanroom compatible
Z Scanner range up to 6.6um with 16bits resolution
X,Y Scanner range

up to 114um with linearity better than 10%

up to 80um with linearity better than 3%

Vibrational noise  
smaller than 30pm
   
   
   
   
   
   
   

 

Tool name:
SPM - Bruker Dimension 3100
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
Bruker
Model:
Dimension 3100 SPM
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
4

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