Picture of Diffractometer Xray - Panalytical X'Pert
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Panalytical X'Pert PRO Materials Research Diffractometer

Location: room D310

 

Description: A 4-circle diffractometer with various pre-aligned fast interchangable x-ray (PREFIX) optical modules for point- and line-focus applications. The X-ray tube with Cu anode gives K-alpha radiation and is typically operated at 45kV (high-tension) and at 40mA (tube current). The open Eulerian geometry MRD cradle accepts wafers up to 4".

Available PREFIX modules (Primary side): # Crossed slits collimator # X-ray lens # Hybrid Asymmetrical Ge[220] 4-bounce monochromator and mirror #

Available PREFIX modules (Secondary side): # Triple axis(Ge[220])/Rocking curve attachment # Parallel beam collimator with flat graphite monochromator # PIXcel 3D CMOS detector matrix (256x256 pixcels, 55 um pitch) 

 

Tool name:
Diffractometer Xray - Panalytical X'Pert
Area/room:
D310
Category:
Metrology
Manufacturer:
Panalytical
Model:
X'Pert PRO MRD
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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