Panalytical X'Pert PRO Materials Research Diffractometer
Location: room D310
Description: A 4-circle diffractometer with various pre-aligned fast interchangable x-ray (PREFIX) optical modules for point- and line-focus applications. The X-ray tube with Cu anode gives K-alpha radiation and is typically operated at 45kV (high-tension) and at 40mA (tube current). The open Eulerian geometry MRD cradle accepts wafers up to 4".
Available PREFIX modules (Primary side): # Crossed slits collimator # X-ray lens # Hybrid Asymmetrical Ge 4-bounce monochromator and mirror #
Available PREFIX modules (Secondary side): # Triple axis(Ge)/Rocking curve attachment # Parallel beam collimator with flat graphite monochromator # PIXcel 3D CMOS detector matrix (256x256 pixcels, 55 um pitch)