Raith CHIPSCANNER150Two – HS
Automated scanning electron microscope for unprejudiced metrology.
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Installed&accepted:
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2022
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Operating System
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Windows 10
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Control software:
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Raith nanosuite
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Stage:
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Interferometer stage XY 150mm x 150mm travel range with 1nm resolution, Z range 15mm
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Workpiece size:
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Chips: tiny (mounted on SEM stud) up to 100mm square
Wafers: 2, 3, 4 and 6
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Auto focusing:
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Height meter based on laser reflection or software AF based on electron beam imaging
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Materials allowed:
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Any vacuum compatible
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Autoloader capacity:
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1 sample holder
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Acceleration voltage:
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1-30kV
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Electron source:
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Shottky TFE
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Spotsize:
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1.6nm @ 20kV, 4nm @1kV
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Max scanning speed:
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50MHz
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Detectors:
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Inlens SE, SE (Everhart Thornley), Angular BSD
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Video Channels
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2 channels can be save simultaneously
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The interferometric stage combined with the auto focusing capabilities allow for wafer scale metrology and into the depth process development. By being able to establish the same coordinate system as the lithography tool and the high precision stage it is possible the measure exactly the features of interest at the position the user intends. This allows for investigating many parameters in the fabrication simultaneously in order to find correlations to improve process reliability and quality.