The Zeiss Supra 60 VP Scanning Electron Microscope is an indispensable tool for inspecting nano-structures down to few nm. The Schottky field emitter offers bright, stable image, and the instrument is very easy to use. Efficiently pumped load-lock can be used for wafers up to 8 inch in size. Work-piece movement over full range is actuated by X-Y motors controlled by joystick.
Funded by: Wallenberg.
Max sample size: 200 mm
Resolution 0.9 nm@30kV, 1.7nm@1kV ( InLens detector, short WD ), 2nm@30kV ( VP mode )
Acc. voltages 0.05kV - 30kV
Probe Current: 4pA - 10nA ( 20nA for EDX )
Source: Schottky Field Emission.
Magnification: up to 3Mx.
Detectors: classical E-T SE, InLens SE, retractable BSE, VPSE, SDD EDX
Possible to be run in VP mode with vacuum 2 - 133Pa.
6-Axes Motorised Super-Eucentric Specimen Stage:
X = 152mm, Y = 152mm, Z = 43mm, Z' = 10mm, T = -15 - 60deg, R = 360 deg