Picture of SEM - Zeiss Supra 60 VP - EDX
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The  Zeiss Supra 60 VP Scanning Electron Microscope is an indispensable tool for inspecting nano-structures down to few nm. The Schottky field emitter offers bright, stable image, and the instrument is very easy to use. Efficiently pumped load-lock can be used for wafers up to 8 inch in size. Work-piece movement over full range is actuated by X-Y motors controlled by joystick.

Funded by: Wallenberg.
Max sample size: 200 mm
Resolution 0.9 nm@30kV, 1.7nm@1kV ( InLens detector, short WD ), 2nm@30kV ( VP mode )
Acc. voltages 0.05kV - 30kV

Probe Current: 4pA - 10nA ( 20nA for EDX )
Source: Schottky Field Emission.

Magnification: up to 3Mx.

Detectors: classical E-T SE, InLens SE, retractable BSE, VPSE, SDD EDX

Possible to be run in VP mode with vacuum 2 - 133Pa.

6-Axes Motorised Super-Eucentric Specimen Stage:

X = 152mm, Y = 152mm, Z = 43mm,  Z' = 10mm, T = -15 - 60deg, R = 360 deg

Tool name:
SEM - Zeiss Supra 60 VP - EDX
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
Zeiss
Model:
Supra 60 VP
Max booking time, day:
3 hours
Max booking time, night:
6 hours
No. of future bookings:
6

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