The Compact 21 T-E cluster tool is a Molecular Beam Epitaxy system from the french MBE provider RIBER. The system was installed in September 2009 initially dedicated to research on Sb based material and devices. The "E" in the model name stands for "Eleven" indicating the number of the available ports. These ports are dedicated to Ga (2 cells),In, Al, As-cracker, Sb-cracker, RF plasma Nitrogen source and Be, Si and Te doping cells. The transfer is done fully automatically thanks to the cluster design of the tool and the platen transfer robot. The system is equipped by a 20 KV RHEED electron gun, an RGA and a pyrometer.
Funded by: Knut and Alice Wallenbergs foundation.