OTF-1200X-4-III-HVC4-UL-101QT
Three zone tube furnace, 1200°C
High vacuum station and 4 channel MFC gas station with PLC touch panel control.
Installed gases: H2 (max 500 sccm), Ar (max 1000 sccm), CH4 (max 2000 sccm), C2H2 (max 2000 sccm)