Wet bench for solvent work and megasonic bath for III/V and nano projects.
A specific tool license is required to be allowed to use the megasonic bath. Tips for programming and safety about using the megasonic bath is available in laminated sheets.
The bath should always be filled with DI water as standard. It is connected to the acid drain, so it can be used for simple SC1/2 cleaning as well. Solvent based chemicals can only be filled up in glass beakers positioned in the water bath. 10 programmes are pre setup in the controller, with 5 at RT and 5 at 65 °C. It takes about 30 min to heat up bath from RT to 70 °C.