Picture of Wet Bench - Solvent - Megasonic bath
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

Wet bench for solvent work and megasonic bath for III/V and nano projects.

A specific tool license is required to be allowed to use the megasonic bath. Tips for programming and safety about using the megasonic bath is available in laminated sheets.

The bath should always be filled with DI water as standard. It is connected to the acid drain, so it can be used for simple SC1/2 cleaning as well. Solvent based chemicals can only be filled up in glass beakers positioned in the water bath. 10 programmes are pre setup in the controller, with 5 at RT and 5 at 65 °C. It takes about 30 min to heat up bath from RT to 70 °C.

Tool name:
Wet Bench - Solvent - Megasonic bath
Area/room:
Processlab 1
Category:
Wet processing
Manufacturer:
Stangl
Model:
628
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

Instructors

Licensed Users

You must be logged in to view tool modes.