Picture of Furnace - Thermolyne - BCB cure
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Tool #436  Furnace BCB cure

Processor controlled furnace for curing of BCB. Only BCB thermal processing is allowed in this furnace.

One standard recipe for 1 hour @ 250°C with slow ramps up/down. The total process time is ~ 2.5hours.

Specifications:

Protecting gas:
N2

Wafer size:
up to 100mm

Max temperature:
280°C

Temperature sensor:
Thermocouple

Alowed substrates:
All “normal” substrates

Tool name:
Furnace - Thermolyne - BCB cure
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
Barnstead Thermolyne
Model:
47900
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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