Picture of Sputter - Pfeiffer
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AVAILABLE
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Tool #426 – Pfeiffer SLS A multi-chamber sputtering system dedicated for advanced radio astronomy receiver development. Available materials in chamber 1: Nb, Al, Pd. Available materials in chamber 2: Si, Ti

Tool name:
Sputter - Pfeiffer
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Pfeiffer Vacuum
Model:
SLS-630G "Spider"
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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