Picture of Hotplate - Wenesco - SU8/BCB
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Hotplate system for SU-8 and BCB deposited wafers, with 3 X 4" surfaces with lifting pins.

Tool name:
Hotplate - Wenesco - SU8/BCB
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Wenesco
Model:
Custom
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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