Picture of Laminator for SUEX Dry Film Photoresist
Current status:
AVAILABLE
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ADEX™ and SUEX™ (DJ MICROLAMINATES Inc.) Dry Film Photoresists are high performance, i-line sensitive, photo-imageable epoxy films available as both sheets and rolls. These films are easily applied using low cost laminating equipment, eliminating the waste and inconvenience associated with spin coating. Film thicknesses from 5 μm to 500 μm and aspect ratios > 20:1 are possible with these convenient to use sheets. Sheets are pre-cut to variety of standard substrate and panel sizes and rolls are available in a variety of widths and lengths. A solvent-free manufacturing technique yields exceptional film thickness uniformity and extremely low average surface roughness. Micro resist technology GmbH is a distributor of DJ Microlaminates Dry Film Photoresists for MEMS, microfluidics and packaging applications.

Tool name:
Laminator for SUEX Dry Film Photoresist
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
GBC
Model:
PRO SERIES 3600
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Remove PET cover foil ⇒ Laminate using hot roll laminator ⇒ Soft Bake: 85 – 95 °C ⇒
Remove PET foil ⇒ Expose: i-line ⇒ Develop: mr-Dev 600, immersion ⇒ Hard Bake (optional):
125 – 200 °C.

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