Picture of Furnace - Wet oxidation
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AVAILABLE
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Wetoxidation furnace for III/V material only. Maximum furnace temperature is 450°C. The only gas available is nitrogen gas for the hot water-bubbler, and for purging the furnace after oxidation. Diameter of furnace pipe is less than 2".

Tool name:
Furnace - Wet oxidation
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
Chalmers
Model:
Furnace for III/V materials
Max booking time, day:
10 hours
Max booking time, night:
10 hours
No. of future bookings:
8

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