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520 (Hobby kit evaporator): Aluminium evaporation system dedicated for single electron device fabrication, designed and built at Chalmers. It has a high precision tilting sample holder for shadow evaporation, and oxygen gas inlet for oxidation of tunnel barriers. The cryo pump gives a clean vacuum and a base pressure of 2*10E-7 mbar. Small samples!

Tool name:
Evaporator - Hobbykit
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Chalmers/Staffan Pehrson
Model:
Angle evaporator
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1030 SEK
High: 1300 SEK

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