Tool #437 Rapid Thermal Processor (RTP) JIPELEC Jet First 200
The JIPELEC Jet First 200 is a PC controlled halogen lamp furnace. It accommodates 200mm wafers or smaller wafers placed on a carrier wafer.
Specifications:
Process gas:
Ar or N2
Wafer size:
up to 200mm
Max temperature:
1000°C
Temperature sensor:
Thermocouple or Pyrometer
Allowed substrates:
Sapphire, SiC, GaN, Si, Quartz