Tool #436 Furnace BCB cure
Processor controlled furnace for curing of BCB. Only BCB thermal processing is allowed in this furnace.
One standard recipe for 1 hour @ 250°C with slow ramps up/down. The total process time is ~ 2.5hours.
Specifications:
Protecting gas:
N2
Wafer size:
up to 100mm
Max temperature:
280°C
Temperature sensor:
Thermocouple
Alowed substrates:
All “normal” substrates