Tool #435 Rapid Thermal Processor (RTP) JIPELEC Jet First 100
The JIPELEC Jet First 100 is a PC controlled halogen lamp furnace. It accommodates 100mm wafers or smaller wafers placed on a 100mm graphite wafer. It is dedicated for thermal processing of GaAs.
Specifications:
Process gas:
Ar or N2
Wafer size:
up to 100mm
Max temperature:
1000°C
Temperature sensor:
Thermocouple or Pyrometer
Allowed substrates:
GaAs